A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer
نویسندگان
چکیده
منابع مشابه
A CMOS-MEMS Thermopile with an Integrated Temperature Sensing Diode for Mid-IR Thermometry
In this paper, we describe an infrared thermopile sensor comprising of single crystal silicon p+ and n+ elements, with an integrated diode temperature sensor fabricated using a commercial SOI-CMOS process followed by Deep Reactive Ion Etching (DRIE). The chip area is 1.16 mm × 1.06 mm. The integrated diode, being on the same substrate, allows a more localized measurement of the cold junction te...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2008
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/18/6/064017